Aligning Single-Layer Cylinders of Block Copolymer Nanodomains using Soft Molding
作者：Li L, Yokoyama H
關鍵字：ASYMMETRIC DIBLOCK COPOLYMERS; ATOMIC-FORCE MICROSCOPY; THIN-FILMS; LITHOGRAPHY; FABRICATION; ALIGNMENT; PATTERNS
論文來源：期刊
By a novel "soft molding" method, a single layer of cylindrical nanodomains in a copolymer thin film is aligned on the macroscopic scale. The domains orient parallel to the surface and perpendicular to the grating pattern of the mold with a density of 3 x 105 lines cm 2