Distinct Molecular Structures of Edge and Middle Positions of Plasma Treated Covered Polymer Film Surfaces Relevant in the Microelectronics Industry
作者：Nathan W. Ulrich, Xu Li, John N. Myers, Jaimal Williamson, Xiaolin Lu, and Zhan Chen
關鍵字：SFG, Microelectronics, Structure
論文來源：期刊
具體來源：IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY, VOL. 7, NO. 8, AUGUST 2017
發(fā)表時間：2017年
Plasma treatment processing is a ubiquitous and necessary processing step in the manufacturing of electronic components. In the semiconductor industry, this processing step is utilized to clean the polymer substrates prior to soldering and applying epoxy underfill resins in flip-chip technology. In this paper, two polymers, polystyrene and polyimide, were protected with a cover and exposed to various plasmas, to simulate the plasma processing steps found within the microelectronics industry.
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7981381